Repair - RPS Integration
Application
• CVD Chameber Clean
• FPD Chameber Clean
• Photoresist Bulk Ash
• Oxidation
• Nitridation
Abatement
Control
• Handles I/O
• Sequences operations within ASTRON
• Automatically controls power
• Monitors For problems
Power Generation
• Switching power supply topology operationg at 400kHz
• Feedback control via measurement of plasma current
Process Benefits
Remove Hot Shower Head Wiping
Reduce Clean Time
Improve Clean Efficiency
Increase Clean Frequenct
Increase Throughput over than 30%(@8KA)
Increase PM Period over than 30%
Improve Particle Performance
Remove 1st Water Effect - Particle and Thickness
Hardware Benefits
Increase Lifetime of Showerhead and Heatblock
No Plasma Attack Inside Chamber
No Swollenness if Showerthead Center Area
No AlxFy (al fiuoride) formation
No Serious Residue of Bottom of Heaterblock
Save PM Time
Company Overview
We welcome you with open arms and a great sense of pride.
EQ GLOBAL is the leading equipment renovation company that is advanced in its technical expertise, and many of our accomplished engineers have been working in the semiconductor and LCD industry for over 20years.
All of EQ GLOBAL's highly qualified employees repair equitments for clients timely and precisely, providing the best possible service to all of our clients through continuous research and development.
These days EQ GLOBAL not only focuses on repair services but also manufactures EG GLOBAL's products.
Our primary goal is to deliver precise, accurate repair service and reasonable price of equipment which ultimately advances our clients' level of technology and puts them ahead of the competition.
We strive to make every effort to achieve customer's high satisfaction through excellent service and superb quality products
Thank you for joining in the EQ GLOBAL experience.
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